This EW-MOVPE2011 workshop is the 14th in the series of European meetings on metalorganic vapour phase epitaxy and related topics. The meetings, organized biannually, became a traditional discussion opportunity for scientific community involved in MOVPE, from universities, research institutes and industries. The EWMOVPE workshop is a forum where all topics relevant to MOVPE are addressed. The scope of the topics ranges from surface science to device development as well as from growth mechanisms to production issues. The aim of the workshop is to gather European physicists, chemists, material science specialists and engineers to discuss the latest trends in the field of MOVPE growth of semiconductors, device fabrication, and related technological problems.

Thirteen workshops were previously held in Aachen (1987), St. Andrews (1988), Montpellier (1989), Nijmegen (1991), Malmö (1993), Gent (1995), Berlin (1997), Prague (1999), Wrexham (2001), Lecce (2003), Lausanne (2005), Bratislava (2007), Neu-Ulm (2009)

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TOPICS:

• Organometallic precursors & chemical sources
• Growth and doping mechanisms
• Reactor and process modelling
• In-situ probing, real time measurements and process monitoring
• Selective area epitaxy, non-planar and self-assembled growth
• Low dimensional structures, nano-epitaxy
• Materials which are typically grown by MOVPE, e.g.
  • III-V compounds (GaSb, GaAs, InP, GaN etc.)
  • II-VI compounds (CdTe, ZnO etc.)
• Diluted nitrides and diluted magnetic semiconductor materials and devices
• MOVPE related device issues
• Safety and industrial issues